Introductory Remarks -- Fundamentals -- Some Fundamentals of Laser Physics -- Principles of Excimer Lasers -- Design and Technology of Excimer Lasers -- High-Repetition-Rate and High-Power Lasers -- High-Energy Lasers -- Excimer Lasers for Microlithography -- Laser Beam Characterization -- Optical Coatings for Excimer Laser Applications -- Small Structures with Large Excimer Lasers -- Historical Review of Excimer Laser Development -- Applications -- Overview -- Ablation -- Micro-Machining -- Via Drilling -- Micro-Processing of Borosilicate Glass and Polymers -- F2-Laser Microfabrication for Photonics and Biophotonics -- Nano-Structuring with Femtosecond Excimer Laser Pulses -- Physical Aspects of Ultra-Fast UV Laser Transfer -- Microlithography -- TFT Annealing -- Fiber Bragg Gratings -- Marking -- Activation and Metallization of Dielectrics -- Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films -- Combustion Analysis -- Medical Applications of Excimer Lasers -- High-Intensity Applications of Excimer Lasers -- High-Repetition-Rate Applications of Excimer Lasers -- New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm -- Trends in Worldwide Excimer Laser Sales.