Polymers for microelectronics : resists and dielectrics
Başlık:
Polymers for microelectronics : resists and dielectrics
ISBN:
9780841227217
Yayın Bilgileri:
Washington, DC : American Chemical Society, 1994.
Fiziksel Tanımlama:
xii, 571 p. : ill. ; 24 cm.
Series:
ACS symposium series, 0097-6156 ;
Series Title:
ACS symposium series, 0097-6156 ; 537
Genel Not:
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Dil:
English