Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology
Başlık:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology
ISBN:
9781566770644
Yayın Bilgileri:
Pennington, NJ : Electrochemical Society, c1993.
Fiziksel Tanımlama:
xi, 628 p. : ill. ; 23 cm.
Series:
Proceedings ; v. 93-6
Proceedings (Electrochemical Society) ; v. 93-6.
Genel Not:
"Electronics Division."
Spine title: Process physics and modeling in semiconductor technology.
Papers from a symposium held in Honolulu, Hawaii, May 19-21, 1993, as part of the Spring Meeting of the Electrochemical Society.
Ek Kurum Yazarı:
Added Title:
Process physics and modeling in semiconductor technology.
Dil:
English